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Mask Sets
The Mask sets listed below are available from the SUNY Poly 300mm fabrication facilities:

90nm       65nm       32nm       TSV

  • 48 & 70nm Testable SERP & COMB structures & M1 and M2
    • Smaller geometries obtainable through RIE shrink process
  • Low-k Films w/ k= 3.0 & 2.4 available
  • Physical trench structures down to 44nm 1:1
    • Via chains M1 : 70nm, V1 : 70nm, M2 : 100nm
      • (48, 48, 100) a few chains up to 10k

Sample mask set options

Integrated MOSCAP
Integrated Planar CMOS
Integrated Non-Planar FinFET
Other Routing Options