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Etch Services
Steve Bennett

"As a leading-edge R & D facility,
SUNY Poly's etch capability
covers a wide range of industry
standard and new "state of the art"
etch processes."

Stephen G.Bennett
CNSE Etch / Deposition
Process Engineer

The etch module processes listed below are available from the SUNY Poly 300 fabrication facilities:

Line/Space STI Etch Process
Line/Space Gate with Spacer Etch Process
Contacts
Trench (M1)
Trench/VIAS (M2 V1)