6/23/2014 10:00:00 AM

Renowned Korean Semiconductor Company Delivers First-of-its-Kind Wafer Etching Tool and TSD-CVD Deposition Integrated Equipment to Albany Nanotech Complex

JUSUNG Engineering builds cutting-edge toolset and relocates highly skilled operational staff for collaboration with the newly merged SUNY CNSE/SUNYIT semiconductor development team

ALBANY, NY – In accordance with Governor Andrew M. Cuomo’s commitment to maintaining New York State’s leadership in nanotechnology, the newly merged SUNY College of Nanoscale Science and Engineering (CNSE) / SUNY Institute of Technology (SUNYIT) today announced a strategic partnership agreement with JUSUNG Engineering Co., Ltd. which includes delivery of state-of-the-art equipment for use in production processes of nanoscale computer chips and the location of technical staff from Korea to the Albany Nanotech campus.

The $10M partnership, supported by 25 researchers and engineers in Korea and New York, focuses on improving manufacturing efficiency, which is a primary objective in semiconductor manufacturing. The JUSUNG etcher (Model name: Genaon Plus) represents a first-of-its-kind design that includes a core process tool to etch novel material metal layers. The cutting-edge tool enables significantly improved semiconductor chip efficiency that will set the standard for future production processes. In addition, JUSUNG employees stationed at the Albany Nanotech Complex will collaborate with researchers from the newly merged CNSE/SUNYIT and its global corporate partners to develop innovative etching and encapsulation techniques critical for advanced technology nodes.

“The addition of JUSUNG Engineering to our team of global semiconductor leaders and specifically to our processing equipment center is further testament to the technology powerhouse that Governor Cuomo continues to build in New York State,” said Dr. Michael Liehr, Executive Vice President of Innovation and Technology of the newly merged CNSE/SUNYIT. “JUSUNG is world renowned for its work in the semiconductor industry. Their contribution of technical expertise and cutting-edge tools further strengthens the newly merged CNSE/SUNYIT’s world-class capabilities, and we anticipate an exciting and mutually beneficial partnership.”

“Our collaboration with the newly merged CNSE/SUNYIT will have significant impact on semiconductor players around the world,” said JUSUNG CEO, Hwang Chul-joo. “The JUSUNG tool being delivered to CNSE is the first in the world that can provide a complete solution of etch and deposition of new metal materials for next-generation devices. Combined with the vast collection best in class tools and practices already in use at the Albany NanoTech campus, we will drive innovation in the global semiconductor industry while strengthening the next-generation semiconductor equipment market.”

The etcher and single type TSD-CVD to be supplied together is semiconductor deposition equipment that enables simultaneous space and time split while allowing for applicability to various processes including nitridation, oxidation, doping and metal electrode deposition functions on top of traditional Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD). Advantages include the absence of polymer residue after etching is complete; over 200 hours MTBC (Mean Time Between Cleaning); and absence of surface plasma damage.

The JUSUNG Genaon Plus is scheduled for arrival to the Albany NanoTech campus June 29, 2014.


About SUNY CNSE. The SUNY College of Nanoscale Science and Engineering (CNSE) is the world leader in the emerging disciplines of nanoscience, nanoengineering, nanobioscience, and nanoeconomics. CNSE represents the world’s most advanced university-driven research enterprise, with more than $20 billion in high-tech investments and over 300 corporate partners. The 1.3 million-square-foot Albany NanoTech megaplex is home to more than 3,100 scientists, researchers, engineers, students, and faculty. CNSE maintains a statewide footprint, operating the Smart Cities Technology Innovation Center (SCiTI) at Kiernan Plaza in Albany, the Solar Energy Development Center in Halfmoon, the Photovoltaic Manufacturing and Technology Development Facility in Rochester, and the Smart System Technology and Commercialization Center (STC) in Canandaigua. CNSE co-founded and manages the Computer Chip Commercialization Center (Quad-C) at SUNYIT and is lead developer of the Marcy Nanocenter site in Utica, as well as the Buffalo High-Tech Manufacturing Complex, Buffalo Information Technologies Innovation and Commercialization Hub, and Medical Innovation and Commercialization Hub. For information, visit

. SUNYIT, the State University of New York Institute of Technology at Utica/Rome, is New York’s public polytechnic, offering undergraduate and graduate degree programs in technology and professional studies. Its academic offerings in technology, including engineering, cybersecurity, computer science, and the engineering technologies, and its programs in professional studies, including business, communication, and nursing, are complemented by athletics, recreational, cultural and campus life programs, events and activities. Founded in 1966, SUNYIT is a unique high-tech learning environment on hundreds of acres, offering degree programs online as well as on campus. The SUNYIT family of alumni now numbers 25,000. For information, visit

About JUSUNG Engineering. JUSUNG is recognized for its world-class technological excellence and product quality in the semiconductor field in the late 1990s, and this expertise in semiconductor equipment has also allowed JUSUNG to successfully enter the display equipment market in 2002. Diversifying its products based on sophisticated technology, JUSUNG has successfully ventured into the solar cell equipment market in 2007; JUSUNG’s products now boast the world’s highest efficiency rating and lowest costs. In 2010, JUSUNG also entered the LED and OLED markets, creating a steady stream of interest in those products as well. For information, visit


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