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Michael Liehr

CNSE Executive Vice President of Innovation and Technology; CNSE Vice President for Research

Read Professor Liehr's Nanotechnology Now Column: CNSE's Novel Semiconductor Research and Development Options for Rapid Commercialization


  • Ph.D., 1982, Physics, RWTH Aachen, Germany
  • M.S. 1978, Physics, RWTH Aachen, Germany
  • Project Management Professional, 2002, PMI
  • Master Certification, 1997, Project Management, George Washington University

Positions held:

  • General Manager, Global 450 mm Consortium (G450C) at CNSE, 2012
  • Associate Vice President Strategy, Alliances and Consortia at CNSE 2009-2011
  • Executive for strategic production alliances and factory synchronization at IBM  2003-2009
  • Foundry technical enablement manager at IBM 2002-2003
  • Manager for analog/mixed-signal and RF CMOS foundry offerings at IBM 2000-2002
  • Manager of logic process technology development and technology transfer at IBM 1996-2000
  • Microelectronics Manufacturing Research manager at IBM T.J. Watson Research Ctr. 1991-1996
  • Researcher at IBM T.J. Watson Research Center 1983-1991

Research Areas:

  • 450mm equipment and factory integration
  • Advanced CMOS logic integration, derivative development and technology transfer
  • Sub-10nm device concepts (integrated photonics, 3D THz interconnects, post-CMOS materials)

Recognition and Positions:

  • SEMATECH Board of Directors (2010)
  • Member IBM Academy of Technology (2009) 
  • IBM Distinguished Engineer (2007)

Recent invited presentations:

  • The CNSE Industry-University-Government Cooperative Model as Applied to Advanced CMOS R&D for 22nm and Beyond, Keynote at Semi New England Meeting, Albany, NY, September 29, 2010
  • A Consortium-Based Approach to the 450mm Transition, Keynote at Semicon Europa, Dresden, Germany, October 20, 2010
  • Enabling Advanced Technology Prototype/Pilot Design and Manufacturing TechXPOT Session at SEMICON West, San Francisco, CA, July 14, 2011
  • Pioneering Innovation to Drive an Educational and Economic Renaissance in New York State, Keynote at IEEE Nano 2011, Portland, OR, August 16, 2011
  • Global 450mm Consortium at CNSE, International Trade Partners Conference, Hawaii, November 9, 2011

Cadence University Program Member